Ultralow Expansion Glass as Material for Advanced Micromechanical Systems

Ultralow expansion (ULE) glasses are of special interest for temperature stabilized systems example in precision metrology. Nowadays, ULE materials mainly used macroscopic and less micromechanical systems. Reasons this a lack technologies parallel fabricating high-quality released microstructures with high accuracy. As result, there is demand transferring these into miniaturized application examples, realistic system modeling, the investigation microscopic material properties. Herein, technological base structures structure height above 100 μm 7972 glass established. main fabrication parameters that important design contribute thus to introduction titanium silicate as glass-based discussed. To study mechanical properties combination respective simulation models, microcantilevers basic elements evaluate other impact factors. The implemented models allow predict deviation only ±5% can effectively support an early stage development.